GEOWELL oil free scroll vacuum pumps are widely used in magnetron sputtering system to provide a clean vacuum environment for high-quality films. It can greatly improve the pass rate of products and create better economic benefits. According to the requirements of sputtering system structure, cavity volume, working vacuum degree and working process, GWSP, GWSPS series oil free scroll vacuum pumps and GWMS series oil free ultra-high vacuum units are applied to various industry equipment and scientific research respectively.
GWSP oil free scroll vacuum pump
GWSPS oil free scroll vacuum pump
GWMS series oil free ultra-high vacuum unit
IC plasma cleaning machine
GWSP and GWSPS series oil free scroll vacuum pumps are used in plasma cleaning system to provide clean vacuum environment for cleaning, activation and reduction of electronic devices / integrated circuits, pretreatment of bonding and bonding, cleaning and disinfection of medical operation mosaic parts and supports, etc.
GWSP oil free scroll vacuum pump
GWSPS oil free scroll vacuum pump
IC plasma polishing machine
GWSP oil free scroll vacuum pumps and GWMS series oil free ultra-high vacuum units are used in plasma polishing system to provide oil free clean vacuum enviornment to ensure the polishing machine's clean vacuum environment to chemically activate the workpiece surface, remove the surface molecular pollution layer, and cross link the surface with chemicals.
GWSP oil free scroll vacuum pump
GWMS series oil free ultra-high vacuum unit
IC packaging machine
GWSP and GWSPS series oil free scroll vacuum pumps are used in IC packaging systems to realize the connection between internal chip and external circuit in clean vacuum environment to prevent the corrosion of the chip circuit by impurities in the air, to increase of electrical performance.