

GWSPS
Product details
Product overview
Operating Principle
GWSPS oil free scroll vacuum pump is constructed with pump head assembly, eccentric main shaft assembly, bracket assembly, air flush assembly, and exhaust valve assembly. The pump head is constructed with one single side orbiting scroll plate and one pump shell. The fixed scroll plate is connected with the pump shell to form a closed cavity, and the orbiting scroll plate is driven by the eccentric main shaft to swing eccentrically in the cavity to form several crescent-shaped pockets of differing sizes. By means of the eccentric drive, the volume of the pockets is gradually reduced and compressed gas from outside towards the inside thereby pumping out the gas from vacuum chamber.
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| 0°(360°)suction | 90° press | 180° press further | 270° exhaust |
Specifications
| Model | GWSPS75 | GWSPS150 | GWSPS300 | GWSPS500 | GWSPS900 | ||
| Pumping Speed | 50Hz | L/s | 1.0 | 2.6 | 4.4 | 6.7 | 11.6 |
| L/min | 60.0 | 156.0 | 264.0 | 402.0 | 693.0 | ||
| m³/h | 3.6 | 9.4 | 15.8 | 24.0 | 41.6 | ||
| cfm | 2.2 | 5.7 | 8.8 | 14.7 | 24.6 | ||
| 60Hz | L/s | 1.2 | 3.1 | 5.3 | 8.0 | 13.9 | |
| L/min | 72.0 | 187.0 | 317.0 | 482.0 | 831.0 | ||
| m³/h | 4.2 | 11.1 | 18.9 | 28.8 | 49.9 | ||
| cfm | 2.4 | 6.8 | 10.6 | 17.6 | 29.5 | ||
| Ultimate Pressure | Pa | ≤15 | ≤10 | ≤8 | ≤5 | ≤200 | |
| mbar | ≤1.5*10-1 | ≤1.0*10-1 | ≤8.0*10-2 | ≤5.0*10-2 | ≤2.0 | ||
| Torr | ≤1.1*10-1 | ≤7.5*10-2 | ≤6.0*10-2 | ≤3.7*10-2 | ≤1.5 | ||
| Psi | ≤2.2*10-3 | ≤1.5*10-3 | ≤1.2*10-3 | ≤7.5*10-4 | ≤2.9*10-2 | ||
| Noise Level | dB (A) | ≤61 | |||||
| Leakage | mbar·l/s | 1*10¯7 | |||||
| Max. Inlet / Exhaust Pressure | Mpa | 0.1 / 0.13 | |||||
| Ambient Operation Temp | °F | 41~104 | |||||
| Cooling Type | Air cooled | ||||||
| Inlet / Exhaust Flange | KF25 / KF16 |
KF40 / KF16 |
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| Motor 1 phase | Power | kw | 0.55 | 0.55 |
0.55 |
-- | -- |
| Voltage | v | 110~115 (60Hz), 200~230 (50Hz) |
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-- | |||
| Speed | rpm | 1425 (50Hz), 1725 (60Hz) |
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| Plug | North America, Europe, UK / Ireland, India |
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| Motor 3 phase | Power | kw | 0.55 | 0.55 |
0.55 |
0.75 | 1.1 |
| Voltage | v | 200~230 or 380~415 (50Hz), 200~230 or 460 (60Hz) | |||||
| Speed | rpm |
1425 (50Hz), 1725 (60Hz) |
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| Dimensions | 1 phase |
mm | 495*238*288 | 500*238*288 |
540*320*385 | -- | -- |
| 3 phase | mm | 495*238*288 |
500*238*288 |
540*320*385 |
570*320*385 |
580*320*385 | |
| Net Weight | 1 phase |
kg | 21 | 22 | 32 | 36 | -- |
| 3 phase |
kg | 20 | 21 | 27 | 38 | 45 | |
Dimensions

| A | B | C | D | E | F | G | H | K | L | M | N | d1 | d2 | |
| GWSPS75 | 495 | 238 | 288 | 254 | 230 | 160 | 126 | 160 | 95 | 67 | 200 | 270 | KF25 | KF16 |
| GWSPS150 | 500 | 238 | 288 | 254 | 230 | 160 | 126 | 160 | 95 | 67 | 200 | 270 | KF25 | KF16 |
| GWSPS300 | 540 | 320 | 385 | 299 | 250 | 164 | 126 | 184 | 134 | 85 | 204 | 290 | KF25 | KF16 |
| GWSPS500 | 570 | 320 | 385 | 299 | 250 | 164 | 126 | 184 | 134 | 85 | 204 | 290 | KF40 | KF16 |
| GWSPS900 | 580 | 320 | 385 | 299 | 250 | 164 | 126 | 184 | 134 | 85 | 204 | 290 | KF40 | KF16 |
Performance curves
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| Evacuation Time (min) | Inlet pressure (Pa) |
| Evacuation time vs inlet pressure relationship curve | Pumping speed vs inlet pressure relationship curve |
Safety Precautions
Be sure the inlet gas temperature must be less than 122℉.
| Features and Benefits | Applications |
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100% no oil clean vacuum No oil back-diffusion, no oil mist exhaust, provide clean vacuum environment Wide product lineup Pumping speed covers3~60m3/h, limited vacuum level 1~8 Pa Suitable for all type of power supply around the world 110/220/380/460v, 50/60Hz for choose Low vibration, low noise 57~63 dB(A), smooth operation High efficiency, ease of maintenance No water cooled, |
Semiconductor industry Vacuum sputtering machine. IC plasma cleaning machine. IC plasma polishing machine. IC packaging machine. IC transmission chamber. Photoelectric industry LED vacuum annealing furnace. Load lock/transfer chambers. Glove box. LED packaging machine. Liquid crystal injection and packaging. |
Material industry Vacuum annealing furnace. Vacuum diffusion oven. 3D metal printing. Single crystal growth furnace. Microwave cleaning and microwave drying machine. E-beam/Laser melting. Vacuum degassing. Vacuum gas substitution. Energy industry SF 6 Gas recovery machine. Lithium battery drying and packaging machine. |
Medical equipment Low temperature plasma sterilizer. Vacuum storage. Dental equipment. Food and drug industry Freezing dry. Vacuum storage. Analyzing instrument and device Spectroscopy/scanning electron microscopy Space environment simulation machine Helium Leak detector Mass spectrometer Cryopump regeneration |










